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Wednesday, July 29, 2020 | History

4 edition of Plasma etching in semiconductor fabrication found in the catalog.

Plasma etching in semiconductor fabrication

Russ A. Morgan

Plasma etching in semiconductor fabrication

by Russ A. Morgan

  • 118 Want to read
  • 5 Currently reading

Published by Elsevier in Amsterdam, New York .
Written in English

    Subjects:
  • Semiconductors -- Etching.,
  • Plasma etching.

  • Edition Notes

    StatementRuss A. Morgan.
    SeriesPlasma technology ;, 1
    Classifications
    LC ClassificationsTK7871.85 .M587 1985
    The Physical Object
    Paginationx, 316 p. :
    Number of Pages316
    ID Numbers
    Open LibraryOL3024088M
    ISBN 100444424199
    LC Control Number85004392

    The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored. Plasma etching is currently used to process semiconducting materials for their use in the fabrication of electronics. Small features can be etched into the surface of the semiconducting material in order to be more efficient or enhance certain properties when used in electronic devices.

    Physical Description of the Plasma -- 9. Going Further.\/span>\"@ en\/a> ; \u00A0\u00A0\u00A0\n schema:description\/a> \" Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. A method of fault detection and classification (FDC) for semiconductor manufacturing equipment Fault Detection and Classification in Plasma Etch Equipment for Semiconductor Manufacturing --Diagnostics - IEEE Journals & MagazineCited by:

    Power-modulated (pulsed) plasmas have demonstrated several advantages compared to continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching rate, better uniformity, and less structural, electrical or radiation (e.g. vacuum ultraviolet) damage. Pulsed plasmas can also ameliorate unwanted artefacts in etched micro-features such as notching, bowing, micro-trenching.   Yagisawa T and Makabe T Temporal velocity distribution of positive and negative ions incident on a wafer in a pulsed two-frequency capacitively coupled plasma in CF4/Ar for SiO2 etching IEEE Trans. Plasma Sci. 31 Crossref Google ScholarCited by:


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Plasma etching in semiconductor fabrication by Russ A. Morgan Download PDF EPUB FB2

This book is based on a post-graduate study carried out by the author on plasma etching mechanisms of semiconductor Plasma etching in semiconductor fabrication book such as silicon, silicon dioxide, photoresist and aluminium films used in integrated circuit fabrication.

In this book he gives an extensive review of the chemistry of dry etching, sustaining mechanisms and reactor : R. Morgan. Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication.4/5(2).

"The subject matter is therefore well tuned to the needs of workers in the semiconductor industry, although it would also serve as an excellent textbook for a final undergraduate year or postgraduate course on the processing of semiconductor materials.

This book is strongly recommended for the libraries of all universities and research Format: Hardcover. Introduction. Plasma Excitation and Reactor Design. Silicon and Silicon Dioxide Etching in Plasmas. Aluminium Etching in Chlorinated Plasmas. The Plasma Etching of III/V Compound Semiconductors.

Operating Frequency and the Plasma. Probe Characteristics and Plasma Measurements of an Electrotech Planar Plasma Etcher. Our discussion of semiconductor etch technology is therefore directly connected to this reference.

Table includes the product characteristics critical to patterning as defined by the roadmap. Plasma etching plays a central role to the enabling of patterning technology, so defined.

About this book Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.

Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms.

The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching Cited by: Etching techniques are commonly used in the fabrication processes of semiconductor devices to remove selected layers for the purposes of pattern transfer, wafer planarization, isolation and cleaning.

There are two fundamental groups of etching: wet etching (liquid-based etchants) and dry etching (plasma-based etchants).File Size: KB.

Plasma etching technologies have been used for many years in the semiconductor industry to transfer the patterns defined by lithography in the active materials that form the. The formation of particulates from the reactant gases is a serious problem in plasma processing because the sheath fields of the plasma trap the particles and release them onto the wafer as contaminants when the plasma is turned off.

The problem of dusty plasmas, which also is of concern in space research. Plasma processing is a central technique in the fabrication of semiconductor devices.

This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication.

It presents the basic physics and chemistry of these processes, and shows how they can be accurately modeled. The author begins with an overview of plasma reactors and discusses the. The chapters on plasma etching in books on semiconductor manufacturing are in general quite easy to read, even for beginners in the field, but rather limited to the description of general principles.

Classics in the literature on plasmas are [3] and [4]. Both books give very good basic information, deducing specific plasma. The etch process removes selected areas from the surface of the wafer so that other materials may be deposited.

“Dry” (plasma) etching is used for circuit-defining steps, while “wet” etching (using chemical baths) is used mainly to clean wafers. Dry etching is one of the most frequently used processes in semiconductor manufacturing. - Buy Plasma Processes for Semiconductor Fabrication (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering) book online at best prices in India on Read Plasma Processes for Semiconductor Fabrication (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering) book reviews & author details and more at Author: W.

Hitchon. The fabrication of microbar solar cells (or microcells) begins with trench formation by top–down photolithography and inductively coupled plasma reactive ion etching (ICP RIE, STS) on a p-type Si () Czochralski wafer (resistivity: 10–20 Ωcm), where the long axes of trenches are aligned perpendicular to the Si [] direction of the wafer as described in Figure The spacing between trenches defines.

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used.

Abstract. In complementary metal oxide semiconductor (CMOS) technology, the integration of porous low-k materials becomes mandatory from the 45 nm technological node and beyond in order to reach interconnect previously described, such porous low-k materials can easily be damaged by all the process steps (especially etching and post-etch treatment processes) that can induce a.

Plasma etch challenges for next-generation semiconductor manufacturing Alternative fabrication schemes based on concurrent engineering of plasma etching can overcome the limitations inherent in optical lithography and thus help to achieve ever smaller device dimensions.

Plasma etching has long enabled the perpetuation of Moore's Law. Today, etch compensation helps to create devices that are smaller than 20 nm.

But, with the constant downscaling in device dimensions and the emergence of complex 3D structures (like FinFet, Nanowire and stacked nanowire at longer term) and sub 20 nm devices, plasma etching requirements have become more and more stringent. In semiconductor fabrication, the traditional approach to dry etching has been to utilize RF plasma to bombard the surface of the wafer with positive ions to remove material between masking layers.

Although ion etching has been effective for decades, it fails to produce the precise, sharp, nano-sized structures and pathways required in next generation devices.Plasma etching or Reactive Ion Etching (RIE) is the workhorse for patterning of semiconductor devices since the early ies when it replaced wet etching in manufacturing.Plasma etching has long enabled the perpetuation of Moore's Law.

Today, etch compensation helps to create devices that are smaller than 20 nm. But, with the constant downscaling in device dimensions and the emergence of complex 3D structures (like FinFet, Nanowire and stacked nanowire at longer term) and sub 20 nm devices, plasma etching.